Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4872189 | Target structure for x-ray lithography system | Robert Frankel | 1989-10-03 |
| 4860328 | Target positioning for minimum debris | Robert Frankel | 1989-08-22 |
| 4837793 | Mass limited target | Robert Frankel | 1989-06-06 |