Issued Patents 1989
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4872189 | Target structure for x-ray lithography system | Jerry Drumheller | 1989-10-03 |
| 4870668 | Gap sensing/adjustment apparatus and method for a lithography machine | Marc MARTIN, David G. Baker, Thomas L. Duft | 1989-09-26 |
| 4860328 | Target positioning for minimum debris | Jerry Drumheller | 1989-08-22 |
| 4837793 | Mass limited target | Jerry Drumheller | 1989-06-06 |