Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871645 | Positive-working photoresist composition | Kazuya Uenishi, Yasumasa Kawabe | 1989-10-03 |
| 4863828 | Positive-working o-quinone diazide photoresist composition | Yasumasa Kawabe, Kazuya Uenishi | 1989-09-05 |
| 4842986 | Positively working resist material | Nobuaki Matsuda, Toshiaki Aoai, Akira Umehara, Yoshimasa Aotani | 1989-06-27 |