Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4826131 | Electrically controllable valve etched from silicon substrates | — | 1989-05-02 |
| 4808260 | Directional aperture etched in silicon | Edward N. Sickafus | 1989-02-28 |
| 4808549 | Method for fabricating a silicon force transducer | Edward N. Sickafus | 1989-02-28 |