Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4812199 | Rectilinearly deflectable element fabricated from a single wafer | — | 1989-03-14 |
| 4808260 | Directional aperture etched in silicon | Mati Mikkor | 1989-02-28 |
| 4808549 | Method for fabricating a silicon force transducer | Mati Mikkor | 1989-02-28 |