Issued Patents 1989
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4874464 | Process for epitaxial deposition of silicon | Dennis L. Goodwin, Mark Hawkins, Wayne Johnson, Aage Olsen | 1989-10-17 |
| 4836138 | Heating system for reaction chamber of chemical vapor deposition equipment | Albert E. Ozias | 1989-06-06 |
| 4828224 | Chemical vapor deposition system | Richard Crabb, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro, Albert E. Ozias +1 more | 1989-05-09 |
| 4798165 | Apparatus for chemical vapor deposition using an axially symmetric gas flow | Wiebe B. deBoer, Klavs F. Jensen, Wayne Johnson, Gary W. Read | 1989-01-17 |