Issued Patents 1989
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4846102 | Reaction chambers for CVD systems | — | 1989-07-11 |
| 4836138 | Heating system for reaction chamber of chemical vapor deposition equipment | McDonald Robinson | 1989-06-06 |
| 4828224 | Chemical vapor deposition system | Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more | 1989-05-09 |
| 4821674 | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment | Wiebe B. deBoer | 1989-04-18 |