Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4803734 | Method of and apparatus for detecting pattern defects | Hiroyuki Onishi, Tetsuo Sano, Eiji Kodama, Hisayuki Tsujinaka, Ryuji Kitakado | 1989-02-07 |
| 4797939 | Pattern masking method and an apparatus therefor | Tetsuo Sano, Ryuji Kitakado, Yoshinori Sezaki, Tomiji Hotta, Hironobu Yano | 1989-01-10 |