Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4864360 | Exposure apparatus | Junji Isohata, Hironori Yamamoto, Makoto Miyazaki, Kunitaka Ozawa, Hideki Yoshinari | 1989-09-05 |
| 4838710 | Static pressure gas bearing assembly | Jiro Ohta, Sadamu Tozawa, Yutaka Maruyama | 1989-06-13 |
| 4822182 | Rotary motion driving apparatus | Hiroyuki Suzuki | 1989-04-18 |