Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4864360 | Exposure apparatus | Junji Isohata, Koichi Matsushita, Makoto Miyazaki, Kunitaka Ozawa, Hideki Yoshinari | 1989-09-05 |
| 4850709 | Fabri-perot spectroscopy method and apparatus utilizing the same | Mikichi Ban, Osamu Kakuchi, Masaru Ohtsuka, Osamu SHIBA, Kazuhiko Hara | 1989-07-25 |
| 4810889 | Fine circuit pattern drawing apparatus and method | Takao Yokomatsu, Mitsuaki Seki | 1989-03-07 |