Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4349409 | Method and apparatus for plasma etching | Hikou Shibayama, Tetsuya Ogawa, Tokushige Hisatsugu, Koichi Kobayashi | 1982-09-14 |
MK
Makoto Kosugi
Overall (1982): #44,449 of 81,411Top 55%
1
Patents 1982