Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4349409 | Method and apparatus for plasma etching | Hikou Shibayama, Makoto Kosugi, Tokushige Hisatsugu, Koichi Kobayashi | 1982-09-14 |
TO
Tetsuya Ogawa
Overall (1982): #28,350 of 81,411Top 35%
1
Patents 1982