Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4336438 | Apparatus for automatic semi-batch sheet treatment of semiconductor wafers by plasma reaction | Hiroyuki Kiyota, Shigekazu Miyazaki, Hisashi Nakane | 1982-06-22 |
| 4318767 | Apparatus for the treatment of semiconductor wafers by plasma reaction | Isamu Hijikata, Hisashi Nakane | 1982-03-09 |