Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4336438 | Apparatus for automatic semi-batch sheet treatment of semiconductor wafers by plasma reaction | Akira Uehara, Shigekazu Miyazaki, Hisashi Nakane | 1982-06-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4336438 | Apparatus for automatic semi-batch sheet treatment of semiconductor wafers by plasma reaction | Akira Uehara, Shigekazu Miyazaki, Hisashi Nakane | 1982-06-22 |