Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4358657 | Sealing system for a movable vacuum chamber of a charged particle beam machine | Karl H. Steigerwald, Erwin Kappelsberger, Clauspeter Monch, Dieter Konig, Wilheim Scheffels | 1982-11-09 |
| 4348576 | Position regulation of a charge carrier beam | Clauspeter Monch | 1982-09-07 |