Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4358657 | Sealing system for a movable vacuum chamber of a charged particle beam machine | Karl H. Steigerwald, Peter Anderl, Clauspeter Monch, Dieter Konig, Wilheim Scheffels | 1982-11-09 |