Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4362611 | Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield | Steve I. Petvai, Cornel Rosu | 1982-12-07 |
| 4333794 | Omission of thick Si.sub.3 N.sub.4 layers in ISA schemes | Klaus D. Beyer | 1982-06-08 |