Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4362611 | Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield | Joseph S. Logan, Steve I. Petvai | 1982-12-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4362611 | Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield | Joseph S. Logan, Steve I. Petvai | 1982-12-07 |