Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4323638 | Reducing charging effects in charged-particle-beam lithography | Arthur C. Adams, Frank B. Alexander, Jr., Hyman J. Levinstein | 1982-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4323638 | Reducing charging effects in charged-particle-beam lithography | Arthur C. Adams, Frank B. Alexander, Jr., Hyman J. Levinstein | 1982-04-06 |