Issued Patents 1982
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4343677 | Method for patterning films using reactive ion etching thereof | Eliezer Kinsbron, William E. Willenbrock, Jr. | 1982-08-10 |
| 4341818 | Method for producing silicon dioxide/polycrystalline silicon interfaces | Arthur C. Adams | 1982-07-27 |
| 4332839 | Method for making integrated semiconductor circuit structure with formation of Ti or Ta silicide | Shyam P. Murarka, Ashok Sinha | 1982-06-01 |
| 4323638 | Reducing charging effects in charged-particle-beam lithography | Arthur C. Adams, Frank B. Alexander, Jr., Louis Thibault | 1982-04-06 |