Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4324611 | Process and gas mixture for etching silicon dioxide and silicon nitride | Diane C. Vogel, Marian C. Tang | 1982-04-13 |
| 4313783 | Computer controlled system for processing semiconductor wafers | John Davies | 1982-02-02 |