Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4324611 | Process and gas mixture for etching silicon dioxide and silicon nitride | Marian C. Tang, Richard F. Reichelderfer | 1982-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4324611 | Process and gas mixture for etching silicon dioxide and silicon nitride | Marian C. Tang, Richard F. Reichelderfer | 1982-04-13 |