Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7147759 | High-power pulsed magnetron sputtering | — | 2006-12-12 |
| 7095179 | Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities | — | 2006-08-22 |
| 6903511 | Generation of uniformly-distributed plasma | — | 2005-06-07 |
| 6896775 | High-power pulsed magnetically enhanced plasma processing | — | 2005-05-24 |
| 6896773 | High deposition rate sputtering | — | 2005-05-24 |
| 6853142 | Methods and apparatus for generating high-density plasma | — | 2005-02-08 |
| 6805779 | Plasma generation using multi-step ionization | — | 2004-10-19 |
| 6806651 | High-density plasma source | — | 2004-10-19 |
| 6806652 | High-density plasma source using excited atoms | — | 2004-10-19 |