| 6491043 |
Ultra-low particle semiconductor cleaner |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
2002-12-10 |
| 6158446 |
Ultra-low particle semiconductor cleaner |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
2000-12-12 |
| 5932027 |
Cleaning and drying photoresist coated wafers |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1999-08-03 |
| 5891256 |
Ultra-low particle semiconductor cleaner |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1999-04-06 |
| 5878760 |
Ultra-low particle semiconductor cleaner |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1999-03-09 |
| 5873947 |
Ultra-low particle disk cleaner |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1999-02-23 |
| 5868150 |
Ultra-low particle semiconductor cleaner |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1999-02-09 |
| 5772784 |
Ultra-low particle semiconductor cleaner |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1998-06-30 |
| 5685327 |
Ultra-low particle semiconductor apparatus |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1997-11-11 |
| 5634978 |
Ultra-low particle semiconductor method |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1997-06-03 |
| 5571337 |
Method for cleaning and drying a semiconductor wafer |
Raj Mohindra, Abhay Bhushan, Rajiv Bhushan, Suraj Puri, Jeffrey Nowell |
1996-11-05 |