Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7115969 | Fixed parallel plate MEMS capacitor microsensor and microsensor array and method of making same | Sanjay V. Patel, Bernd Fruhberger, Erno H. Klaassen, David R. Baselt | 2006-10-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7115969 | Fixed parallel plate MEMS capacitor microsensor and microsensor array and method of making same | Sanjay V. Patel, Bernd Fruhberger, Erno H. Klaassen, David R. Baselt | 2006-10-03 |