Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11686637 | Silicon carbide-based combined temperature-pressure micro-electro-mechanical system (MEMS) sensor chip and preparation method thereof | Xudong Fang, Ziyan FANG, Chen WU, Hao Sun, Libo Zhao +6 more | 2023-06-27 |