Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6724125 | Methods and apparatus for diffractive optical processing using an actuatable structure | Erik Deutsch, Stephen D. Senturia | 2004-04-20 |
| 6664706 | Electrostatically-controllable diffraction grating | Erik Deutsch, Stephen D. Senturia | 2003-12-16 |
| 6552328 | Microsensor including a VCSEL and method for electro-mechanical coupling of microsensors | Andrew Berlin | 2003-04-22 |
| 6412131 | Microelectromechanical mechanisms for real-time mechanical vibration signature monitoring and analysis | Feng Zhao, Andrew Berlin | 2002-07-02 |
| 6374677 | Micromechanical discrete time and frequency characterization of signals via resonator clamping and motion-arresting mechanisms | Andrew Berlin, Feng Zhao | 2002-04-23 |
| 6327909 | Bistable mechanical sensors capable of threshold detection and automatic elimination of excessively high amplitude data | Andrew Berlin, Feng Zhao | 2001-12-11 |
| 6329738 | Precision electrostatic actuation and positioning | Erik Deutsch, Stephen D. Senturia | 2001-12-11 |