Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7598098 | Monitoring the reduction in thickness as material is removed from a wafer composite and test structure for monitoring removal of material | — | 2009-10-06 |
| 7588948 | Test structure for electrically verifying the depths of trench-etching in an SOI wafer, and associated working methods | — | 2009-09-15 |
| 7517813 | Two-step oxidation process for semiconductor wafers | Uwe Eckoldt | 2009-04-14 |
| 7271074 | Trench insulation in substrate disks comprising logic semiconductors and power semiconductors | Uwe Eckoldt | 2007-09-18 |