Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448966 | Photoresist-removing liquid and photoresist-removing method | Fucheng Sun, Zhikai Wang | 2022-09-20 |
| 11417542 | Semiconductor processing apparatus and method | Zhikai Wang | 2022-08-16 |
| 11101148 | Semiconductor processing apparatus and method | Zhikai Wang | 2021-08-24 |
| 10766665 | Method for manufacturing a chemical container | — | 2020-09-08 |
| 10586717 | Semiconductor processing apparatus and method | Zhikai Wang | 2020-03-10 |
| 10475639 | Apparatus and method for processing semiconductor wafer surface with ozone-containing fluid | Nitao Zhang | 2019-11-12 |
| 10283389 | Adjustable semiconductor processing device and control method thereof | — | 2019-05-07 |
| 10196172 | Chemical container and method for manufacturing the same | — | 2019-02-05 |
| 10121681 | Semiconductor processing device | — | 2018-11-06 |
| 9859134 | Multi-chamber semiconductor processing device | — | 2018-01-02 |
| 9368378 | Semiconductor wafer cleaning system | — | 2016-06-14 |
| 7938906 | Method and apparatus for dynamic thin-layer chemical processing of semiconductor wafers | — | 2011-05-10 |
| 7790621 | Ion implantation for increasing etch rate differential between adjacent materials | — | 2010-09-07 |