Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339581 | Photolithographic mask optimization method and system without border defects | Haiqing Wei | 2025-06-24 |
| 12306543 | Optical imaging method, device and system for photolithography system | Haiqing Wei | 2025-05-20 |
| 12050407 | Light source calibration method and system employed in source mask optimization | Haiqing Wei | 2024-07-30 |