Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371783 | Internal chamber processing method and substrate processing method | Ah Young Hwang, Won-Jun Jang, Kyung PARK, Jin Seo Kim, Won Sik Ahn +2 more | 2025-07-29 |
| 12027371 | Substrate processing method | Ah Young Hwang, Won-Jun Jang, Kyung PARK, Sang Rok Nam, Hae Jin Ahn +2 more | 2024-07-02 |