Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12024777 | Method of processing substrate | Dae Seong Lee, Kyung PARK | 2024-07-02 |
| 11965244 | Substrate processing method, substrate processing apparatus using the same, and semiconductor device manufacturing method | Kyung PARK, Dae Seong Lee | 2024-04-23 |