Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769681 | Transfer robot and substrate processing apparatus having the same | Kyung Hee Jeon, Hun Hee Na | 2023-09-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769681 | Transfer robot and substrate processing apparatus having the same | Kyung Hee Jeon, Hun Hee Na | 2023-09-26 |