Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7299538 | Method for fabricating micro-electro-mechanical systems | — | 2007-11-27 |
| 7064637 | Recessed electrode for electrostatically actuated structures | Subham Sett | 2006-06-20 |