Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7418353 | Determining film stress from substrate shape using finite element procedures | Edward G. Lovell, Zhaohua Feng | 2008-08-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7418353 | Determining film stress from substrate shape using finite element procedures | Edward G. Lovell, Zhaohua Feng | 2008-08-26 |