Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7545234 | Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof | — | 2009-06-09 |
| 7466215 | Balanced MEMS switch for next generation communication systems | — | 2008-12-16 |
| 7352266 | Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch | — | 2008-04-01 |
| 7230513 | Planarized structure for a reliable metal-to-metal contact micro-relay MEMS switch | — | 2007-06-12 |
| 7101724 | Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation | — | 2006-09-05 |
| 6962832 | Fabrication method for making a planar cantilever, low surface leakage, reproducible and reliable metal dimple contact micro-relay MEMS switch | — | 2005-11-08 |