Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4557986 | High resolution lithographic process | — | 1985-12-10 |
| 4454209 | High resolution soft x-ray or ion beam lithographic mask | — | 1984-06-12 |
| 4357417 | High resolution lithography using protons or alpha particles | John Bartko, Patrick E. Felice | 1982-11-02 |