Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4610775 | Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber | — | 1986-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4610775 | Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber | — | 1986-09-09 |