Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4289797 | Method of depositing uniform films of Si.sub.x N.sub.y or Si.sub.x O.sub.y in a plasma reactor | — | 1981-09-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4289797 | Method of depositing uniform films of Si.sub.x N.sub.y or Si.sub.x O.sub.y in a plasma reactor | — | 1981-09-15 |