Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5911889 | Method of removing damaged crystal regions from silicon wafers | Laszlo Fabry, Edeltraud Steiger | 1999-06-15 |
| 5693149 | Process for treating disk-shaped workpieces with a liquid | Rudolf Wengbauer, Ludwig Pichlmeier | 1997-12-02 |