Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354921 | System for cross stream regassifier for improved chemical mechanical polishing in the manufacture of semiconductors | Alexander Patrick Sheridan Wood | 2002-03-12 |
| 5504346 | Insitu detection of tube sagging in semiconductor diffusion furnace using a laser beam that is blocked when tube sags | Allen Page | 1996-04-02 |
| 5303558 | Thermal trap for gaseous materials | Craig A. Bellows, Curtis Maurice Hebert, Steve J. Schaper | 1994-04-19 |