Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4438315 | High selectivity plasma etching apparatus | Hiroyasu Toyoda, Hideaki Itakura | 1984-03-20 |
| 4348577 | High selectivity plasma etching method | Hiroyasu Toyoda, Hideaki Itakura | 1982-09-07 |