Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5156727 | Film thickness uniformity control apparatus for in-line sputtering systems | Erik J. Bjornard, Clifford L. Taylor | 1992-10-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5156727 | Film thickness uniformity control apparatus for in-line sputtering systems | Erik J. Bjornard, Clifford L. Taylor | 1992-10-20 |