Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6450200 | Flow control of process gas in semiconductor manufacturing | — | 2002-09-17 |
| 6363958 | Flow control of process gas in semiconductor manufacturing | — | 2002-04-02 |
| 6363959 | Fluid pressure regulator with differential pressure setting control | — | 2002-04-02 |
| 6328054 | Balanced fluid pressure regulator | Richard L. Martin | 2001-12-11 |
| 6003535 | Micro control valve and apparatus and method for making semiconductors with high purity process gas | — | 1999-12-21 |
| 5787925 | Pneumatically servoed gas pressure regulator | — | 1998-08-04 |
| 5762086 | Apparatus for delivering process gas for making semiconductors and method of using same | — | 1998-06-09 |
| 5755428 | Valve having metal-to metal dynamic seating for controlling the flow of gas for making semiconductors | — | 1998-05-26 |
| 5732736 | Pressure regulator with lower outlet pressure drop | — | 1998-03-31 |
| 5458001 | Gas pressure regulator, diaphragm assembly therefor and method of making same | — | 1995-10-17 |
| 5230359 | Supply pressure compensated fluid pressure regulator and method | — | 1993-07-27 |
| 4702277 | Cylinder valve-regulator | — | 1987-10-27 |
| 4471803 | Flow limit shutoff valve | — | 1984-09-18 |
| 4257450 | Pressure-reducing regulator valve for high-pressure gases | — | 1981-03-24 |