Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10022745 | Apparatus for dual speed spin chuck | William Gilbert Breingan, James Anders | 2018-07-17 | |
| 9768041 | Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle | Ray Regan, William Gilbert Breingan | 2017-09-19 | |
| 6539952 | Megasonic treatment apparatus | — | 2003-04-01 | |
| RE36767 | Wafer scrubbing device | — | 2000-07-11 | |
| 5675856 | Wafer scrubbing device | — | 1997-10-14 | |
| 4362980 | Position error recovery and motor control system | — | 1982-12-07 | $11,882,000 |