| 11815196 |
Vacuum valve |
— |
2023-11-14 |
| 11326699 |
Connecting apparatus for the connection of a valve rod to a closure member of a vacuum valve |
— |
2022-05-10 |
| 10876637 |
Closure element for a vacuum seal having a friction stir welding connection |
Rudolf Gfeller, Max Hossfeld |
2020-12-29 |
| 10184291 |
Door for closing a chamber opening in a chamber wall of a vacuum chamber |
— |
2019-01-22 |
| 9791052 |
Vacuum slide gate valve |
— |
2017-10-17 |
| 9732860 |
Valve, in particular a vacuum valve |
Markus Nesensohn |
2017-08-15 |
| 9581262 |
Vacuum valve |
Bernhard Duelli, Anton Neumeir, Christoph Angst |
2017-02-28 |
| 9528614 |
Vacuum valve and closure member for closing a flow path in a gas-tight manner by means of a linear movement |
Friedrich Geiser, Anton Neumeir, Berhard Duelli, Karlheinz Summer |
2016-12-27 |
| 8960641 |
Vacuum valve |
— |
2015-02-24 |
| 8950729 |
Gate valve with linearly displaceable closing members |
Friedrich Geiser |
2015-02-10 |
| 8678344 |
Mounting of a valve plate on a valve rod |
Florian Ehrne |
2014-03-25 |
| 8672293 |
Vacuum valve |
Florian Ehrne |
2014-03-18 |
| 7500649 |
Vacuum valve drive |
Bernhard Litscher |
2009-03-10 |
| 6916009 |
Load-lock device for introducing substrates into a vacuum chamber |
— |
2005-07-12 |
| 6685163 |
Vacuum valve |
— |
2004-02-03 |
| 6056266 |
Device for closing an opening of a tank or a tubular conduit |
— |
2000-05-02 |
| 5909867 |
Closing assembly for a chamber having a through-opening |
— |
1999-06-08 |