Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282725 | Wafer transfer unit and wafer transfer system | Florian Ehrne, Martin Netzer, Andreas Hofer, Marco Apolloni, Thomas L. Swain | 2022-03-22 |
| 8511642 | Closing unit for a vacuum valve | Stefan Schoch, Andreas Mark | 2013-08-20 |