Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4694477 | Flexure stage alignment apparatus | — | 1987-09-15 |
| 4613981 | Method and apparatus for lithographic rotate and repeat processing | Steven Eaton, James B. Kruger, Garrett A. Garrettson, Armand P. Neukermans | 1986-09-23 |
| 4592081 | Adaptive X-ray lithography mask | Steven Eaton | 1986-05-27 |
| 4506184 | Deformable chuck driven by piezoelectric means | — | 1985-03-19 |