Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154782 | Excimer lamp and excimer lamp device | — | 2024-11-26 |
| 11102889 | Desmearing method and desmearing device | Kenichi Hirose, Tomoyuki HABU, Shinichi Endo | 2021-08-24 |
| 9859131 | Desmear treatment device and desmear treatment method | Tomoyuki HABU | 2018-01-02 |
| 9050633 | Template washing method, pattern forming method, photowashing apparatus, and nanoimprint apparatus | — | 2015-06-09 |