Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5175020 | Process for depositing a layer containing boron and nitrogen | Guenther Doellein, Guenter Weidenbach, Hans-Robert Meyer, Andreas Weber, Claus-Peter Klages | 1992-12-29 |
| 5112649 | Method of depositing micro-crystalline solid particles by hot filament CVD | Claus-Peter Klages, Rolf Six, Lothar Schäfer | 1992-05-12 |
| 4786887 | Thin-film strain gauge system and method of manufacturing same | Olaf Dössel, Klaus W. Gerstenberg, Gerhard Kursten, Reiner U. Orlowski, Detlef G. Schon | 1988-11-22 |
| 4715319 | Device for coating a substrate by means of plasma-CVD or cathode sputtering | Klaus Drews, Detlef G. Schon | 1987-12-29 |
| 4673588 | Device for coating a substrate by means of plasma-CVD or cathode sputtering | Klaus Drews, Detlef G. Schon | 1987-06-16 |